Customization: | Available |
---|---|
Warranty: | 1 Year |
Accuracy: | ±0.6-1% |
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Model | 5800 | |
Full Scale Range (N2 eqv.) | 2 SCCM - 50 SLM | |
Control Valve | Normally closed/Normally Open | |
Fitting | 1/4"VCR or 1/4" Swagelok Compatible | |
Seal | FKM Seal | FKM |
Metal/All Metal Seal | Ni | |
Response Time | ≤0.8 sec | |
Accuracy | ≥25% F.S. | ≤±1% S.P. |
<25% F.S. | ≤± 0.25% F.S. | |
Linearity | ≤±0.5% F.S.(≥30SLM: ≤1%) | |
Repeatability | ≤±0.1% F.S. | |
Operating Differential Pressure |
2 SCCM - 5 SLM | 0.05 - 0.28 MPa |
6 SLM - 50 SLM | 0.1 - 0.28 MPa | |
Leak Integrity | FKM Seal | Max 1x10-9Pa.m3/sec (He) |
Metal/All Metal Seal | Max 1x10-11Pa.m3/sec (He) | |
Control Range | 2-100% F.S. | |
Max operating Pressure | 0.48 MPa | |
Proof Pressure | 1 MPa | |
Communication Type | Digital: RS-485 / Analog: DC 0-5V | |
Power Supply | ±15VDC | +15VDC ±2% 25mA |
-15VDC ±2% 180mA | ||
+12VDC - +32VDC | +12VDC 500mA - +32VDC 180mA | |
Output Signal | Digital: RS-485 / Analog: DC 0-5V | |
Power Consumption | ±15VDC | 3.1W |
+12VDC - +32VDC | 6W | |
Operation Temperature | 5-45 Deg C | |
Material | FKM Seal | SUS316L, FKM, PTFE, Electromagnetic stainless steel |
Metal Metal Seal | SUS316L, Ni, PTFE, Electromagnetic stainless steel | |
All Metal Seal | SUS316L, Ni, Electromagnetic stainless steel | |
Surface Finish | FKM Seal | ≤5RA |
Metal Seal | TC,≤5RA | |
Weight | appr. 0.8 KG |
Model | 5800 | |
Full Scale Range (N2 eqv.) | 50 SLM - 150 SLM | |
Control Valve | Normally closed/Normally Open | |
Fitting | 3/8"VCR or 1/2" Swagelok Compatible | |
Seal | FKM Seal | FKM |
Metal/All Metal Seal | Ni | |
Response Time | ≤2 sec | |
Accuracy | ≤±1.5% F.S. | |
Linearity | ≤±0.5% F.S. | |
Repeatability | ≤±0.2% F.S. | |
Leak Integrity | FKM Seal | Max 1x10-9Pa.m3/sec (He) |
Metal/All Metal Seal | Max 1x10-11Pa.m3/sec (He) | |
Control Range | 2-100% F.S. | |
Max operating Pressure | 0.48 MPa | |
Proof Pressure | 1 MPa | |
Communication Type | Digital: RS-485 / Analog: DC 0-5V | |
Power Supply | ±15VDC | +15VDC ±2% 25mA |
-15VDC ±2% 180mA | ||
+12VDC - +32VDC | +12VDC 500mA - +32VDC 180mA | |
Output Signal | Digital: RS-485 / Analog: DC 0-5V | |
Power Consumption | ±15VDC | 3.1W |
+12VDC - +32VDC | 6W | |
Operation Temperature | 5-45 Deg C | |
Material | FKM Seal | SUS316L, FKM, PTFE, Electromagnetic stainless steel |
Metal Metal Seal | SUS316L, Ni, PTFE, Electromagnetic stainless steel | |
All Metal Seal | SUS316L, Ni, Electromagnetic stainless steel | |
Surface Finish | FKM Seal | ≤5RA |
Metal Seal | TC,≤5RA | |
Weight | appr. 1.8 KG |
Model | 5800 | |
Full Scale Range (N2 eqv.) | 100 SLM - 300 SLM | |
Control Valve | Normally closed/Normally Open | |
Fitting | 3/8"VCR or 1/2" Swagelok Compatible | |
Seal | FKM Seal | FKM |
Metal/All Metal Seal | Ni | |
Response Time | ≤ 2 sec | |
Accuracy | ≤± 2% F.S. | |
Linearity | ≤±0.5% F.S. | |
Repeatability | ≤±0.2% F.S. | |
Operating Differential Pressure |
100 SLM - 150 SLM | 0.15Mpa - 0.3 MPa |
150 SLM- 200 SLM | 0.18Mpa - 0.3 MPa | |
200 SLM - 300 SLM | 0.21Mpa - 0.3 Mpa MPa | |
Leak Integrity | FKM Seal | Max 1x10-9Pa.m3/sec (He) |
Metal/All Metal Seal | Max 1x10-11Pa.m3/sec (He) | |
Control Range | 2-100% F.S. | |
Max operating Pressure | 0.48 MPa | |
Proof Pressure | 1 MPa | |
Communication Type | Digital: RS-485 / Analog: DC 0-5V | |
Power Supply | ±15VDC | +15VDC ±2% 25mA |
-15VDC ±2% 180mA | ||
+12VDC - +32VDC | +12VDC 500mA - +32VDC 180mA | |
Output Signal | Digital: RS-485 / Analog: DC 0-5V | |
Power Consumption | ±15VDC | 3.1W |
+12VDC - +32VDC | 6W | |
Operation Temperature | 5-45 Deg C | |
Material | FKM Seal | SUS316L, FKM, PTFE, Electromagnetic stainless steel |
Metal Metal Seal | SUS316L, Ni, PTFE, Electromagnetic stainless steel | |
All Metal Seal | SUS316L, Ni, Electromagnetic stainless steel | |
Surface Finish | FKM Seal | ≤5RA |
Metal Seal | TC,≤5RA | |
Weight | appr. 1.93 KG |
Model | 5800 | |
Full Scale Range (N2 eqv.) | 300 SLM - 2000 SLM | |
Control Valve | Normally closed/Normally Open | |
Fitting | 3/4"VCR or 1" Swagelok Compatible | |
Seal | FKM Seal | FKM |
Response Time | ≤ 2 sec | |
Accuracy | ≤± 2% F.S. | |
Linearity | ≤± 1% F.S. | |
Repeatability | ≤± 0.25% F.S. | |
Operating Differential Pressure |
0.25Mpa - 0.7 MPa | |
Leak Integrity | FKM Seal | Max 1x10-9Pa.m3/sec (He) |
Control Range | 2-100% F.S. | |
Max operating Pressure | 0.7 MPa | |
Proof Pressure | 3 MPa | |
Communication Type | Digital: RS-485 / Analog: DC 0-5V | |
Power Supply | ±15VDC | +15VDC ±2% 25mA |
-15VDC ±2% 180mA | ||
+12VDC - +32VDC | +12VDC 500mA - +32VDC 180mA | |
Output Signal | Digital: RS-485 / Analog: DC 0-5V | |
Power Consumption | ±15VDC | 3.1W |
+12VDC - +32VDC | 6W | |
Operation Temperature | 5-45 Deg C | |
Material | FKM Seal | SUS316L, FKM, PTFE, Electromagnetic stainless steel |
Surface Finish | FKM Seal | ≤5RA |
Metal Seal | TC,≤5RA | |
Weight | appr. 5.22 KG |
Model | Digital Communication | 58 | |||||||||
Series | Standard model | 00 | |||||||||
Product Type | Mass Flow Controller | FC | |||||||||
Mass Flow Meter | FM | ||||||||||
Seal | FKM | R | |||||||||
Metal | M | ||||||||||
All Metal | T | ||||||||||
Communication | Digital (RS485/Modbus)& Analog 9pin/±15v | RN | |||||||||
Digital (RS485/Modbus)& Analog 9pin/12-32v | RV | ||||||||||
Digital (RS485/Modbus)& Analog 9pin/±15v LCD | RM | ||||||||||
Digital (RS485/Modbus)& Analog 9pin/12-32v LCD | RW | ||||||||||
Control Valve | Normally Closed | C | |||||||||
Normally Open(*1) | O | ||||||||||
Temperature | Standard 5-45 Deg C | S | |||||||||
High Temperature* | H | ||||||||||
Fitting(*2) | 1/8" VCR | E2V | |||||||||
1/4" VCR | E4V | ||||||||||
1/8" Swagelok Compatible | E2S | ||||||||||
1/4" Swagelok Compatible | E4S | ||||||||||
3/8" Swagelok Compatible | E6S | ||||||||||
1/2" Swagelok Compatible | E8S | ||||||||||
1" Swagelok Compatible | EGS | ||||||||||
6mm LOK | G6S | ||||||||||
10mm LOK | GXS | ||||||||||
6mm Tube Quick connctor | G6T | ||||||||||
IGS 1.125"C-SEAL | IGC | ||||||||||
IGS 1.125"W-SEAL | IGW | ||||||||||
GAS | Gas | N2 | |||||||||
Full Scale | Flow Rate | 100 SCCM |
EXAMPLE MFC:5800-FCRRNCS-E4V-N2-100SCCM / MFM:5800-FMRRNS-E4V-N2-100SCCM |
(*1) For customized models, please contact your sales representative. (*2) For more fitting options, please contact your sales representative. (*3) Flow rate is calibrated (N2 eqv.) at standard temperature and pressure. (Standard: 0 Deg C and 101kPa) (*4)5800 digital RS-485 model is available with analog model (DC 0-5V) (*5)More requirement of Electrolytic Polishing or Passivating , please contact your sales representative. (*6) Temperature for High Temperature models can be customized. |