Mass Flow Controller Is a Flow Control Device That Measures Mass Flow and Automatically Controls It to a Set Flow Rate

• Customization: Available
• Warranty: 1 Year
• Accuracy: ±0.6-1%
• Model NO.: 5800 Series
• Main Application: Nature Gas
• Size: DN5-10
• Sensor: Thermal Flow
• Application: Industrial Production
• Type: Thermal Flow Controller
• Measuring Media: Gas
• Measuring Principle: Thermal Flow
• Measurement Object: Closed Pipeline
• Certification: CE, RoHS
• Communication: RS-485 / DC 0-5V
• Operation Temperature: 5-45ºC
• Power: ±15VDC / DC24V
• Seal: Ffkm / Metal Seal
• Weight: 0.8kg -5.22kg
• Transport Package: Carton Packing
• Specification: 2SCCM-2000SLM
• Trademark: AEORHC
• Origin: China
• HS Code: 9026801000

Product Description

APPENDIX 2  SPECIFICATIONS 

5800 Digital UP TO 50SLM MASS FLOW CONTROLLER/METER

Model	5800
Full Scale Range (N2 eqv.)	2 SCCM - 50 SLM
Control Valve	Normally closed/Normally Open
Fitting	1/4"VCR or 1/4" Swagelok Compatible
Seal	FKM Seal	FKM
	Metal/All Metal Seal	Ni
Response Time	≤0.8 sec
Accuracy	≥25% F.S.	≤±1% S.P.
	<25% F.S.	≤± 0.25% F.S.
Linearity	≤±0.5%  F.S.(≥30SLM: ≤1%)
Repeatability	≤±0.1%  F.S.
Operating Differential  Pressure	2 SCCM - 5 SLM	0.05 - 0.28 MPa
	6 SLM - 50 SLM	0.1 - 0.28 MPa
Leak Integrity	FKM Seal	Max 1x10-9Pa.m3/sec (He)
	Metal/All Metal Seal	Max 1x10-11Pa.m3/sec (He)
Control Range	2-100% F.S.
Max operating Pressure	0.48 MPa
Proof Pressure	1 MPa
Communication Type	Digital: RS-485 / Analog: DC 0-5V
Power Supply	±15VDC	+15VDC ±2% 25mA
		-15VDC ±2% 180mA
	+12VDC - +32VDC	+12VDC 500mA - +32VDC 180mA
Output Signal	Digital: RS-485 / Analog: DC 0-5V
Power Consumption	±15VDC	3.1W
	+12VDC - +32VDC	6W
Operation Temperature	5-45 Deg C
Material	FKM Seal	SUS316L, FKM, PTFE, Electromagnetic stainless steel
	Metal Metal Seal	SUS316L, Ni, PTFE, Electromagnetic stainless steel
	All Metal Seal	SUS316L, Ni, Electromagnetic stainless steel
Surface Finish	FKM Seal	≤5RA
	Metal Seal	TC,≤5RA
Weight	appr. 0.8 KG

5800 Digital UP TO 150SLM MASS FLOW CONTROLLER/METER

Model	5800
Full Scale Range (N2 eqv.)	50 SLM - 150 SLM
Control Valve	Normally closed/Normally Open
Fitting	3/8"VCR or 1/2" Swagelok Compatible
Seal	FKM Seal	FKM
	Metal/All Metal Seal	Ni
Response Time	≤2 sec
Accuracy	≤±1.5% F.S.
Linearity	≤±0.5%  F.S.
Repeatability	≤±0.2%  F.S.
Leak Integrity	FKM Seal	Max 1x10-9Pa.m3/sec (He)
	Metal/All Metal Seal	Max 1x10-11Pa.m3/sec (He)
Control Range	2-100% F.S.
Max operating Pressure	0.48 MPa
Proof Pressure	1 MPa
Communication Type	Digital: RS-485 / Analog: DC 0-5V
Power Supply	±15VDC	+15VDC ±2% 25mA
		-15VDC ±2% 180mA
	+12VDC - +32VDC	+12VDC 500mA - +32VDC 180mA
Output Signal	Digital: RS-485 / Analog: DC 0-5V
Power Consumption	±15VDC	3.1W
	+12VDC - +32VDC	6W
Operation Temperature	5-45 Deg C
Material	FKM Seal	SUS316L, FKM, PTFE, Electromagnetic stainless steel
	Metal Metal Seal	SUS316L, Ni, PTFE, Electromagnetic stainless steel
	All Metal Seal	SUS316L, Ni, Electromagnetic stainless steel
Surface Finish	FKM Seal	≤5RA
	Metal Seal	TC,≤5RA
Weight	appr. 1.8 KG

5800 Digital UP TO 300SLM MASS FLOW CONTROLLER/METER

Model	5800
Full Scale Range (N2 eqv.)	100 SLM - 300 SLM
Control Valve	Normally closed/Normally Open
Fitting	3/8"VCR or 1/2" Swagelok Compatible
Seal	FKM Seal	FKM
	Metal/All Metal Seal	Ni
Response Time	≤ 2 sec
Accuracy	≤± 2% F.S.
Linearity	≤±0.5%  F.S.
Repeatability	≤±0.2%  F.S.
Operating Differential  Pressure	100 SLM - 150 SLM	0.15Mpa - 0.3 MPa
	150 SLM- 200 SLM	0.18Mpa - 0.3 MPa
	200 SLM - 300 SLM	0.21Mpa - 0.3 Mpa MPa
Leak Integrity	FKM Seal	Max 1x10-9Pa.m3/sec (He)
	Metal/All Metal Seal	Max 1x10-11Pa.m3/sec (He)
Control Range	2-100% F.S.
Max operating Pressure	0.48 MPa
Proof Pressure	1 MPa
Communication Type	Digital: RS-485 / Analog: DC 0-5V
Power Supply	±15VDC	+15VDC ±2% 25mA
		-15VDC ±2% 180mA
	+12VDC - +32VDC	+12VDC 500mA - +32VDC 180mA
Output Signal	Digital: RS-485 / Analog: DC 0-5V
Power Consumption	±15VDC	3.1W
	+12VDC - +32VDC	6W
Operation Temperature	5-45 Deg C
Material	FKM Seal	SUS316L, FKM, PTFE, Electromagnetic stainless steel
	Metal Metal Seal	SUS316L, Ni, PTFE, Electromagnetic stainless steel
	All Metal Seal	SUS316L, Ni, Electromagnetic stainless steel
Surface Finish	FKM Seal	≤5RA
	Metal Seal	TC,≤5RA
Weight	appr. 1.93 KG

5800 Digital UP TO 2000SLM MASS FLOW CONTROLLER/METER

Model	5800
Full Scale Range (N2 eqv.)	300 SLM - 2000 SLM
Control Valve	Normally closed/Normally Open
Fitting	3/4"VCR or 1" Swagelok Compatible
Seal	FKM Seal	FKM
Response Time	≤ 2 sec
Accuracy	≤± 2% F.S.
Linearity	≤± 1%  F.S.
Repeatability	≤± 0.25%  F.S.
Operating Differential  Pressure	0.25Mpa - 0.7 MPa
Leak Integrity	FKM Seal	Max 1x10-9Pa.m3/sec (He)
Control Range	2-100% F.S.
Max operating Pressure	0.7 MPa
Proof Pressure	3 MPa
Communication Type	Digital: RS-485 / Analog: DC 0-5V
Power Supply	±15VDC	+15VDC ±2% 25mA
		-15VDC ±2% 180mA
	+12VDC - +32VDC	+12VDC 500mA - +32VDC 180mA
Output Signal	Digital: RS-485 / Analog: DC 0-5V
Power Consumption	±15VDC	3.1W
	+12VDC - +32VDC	6W
Operation Temperature	5-45 Deg C
Material	FKM Seal	SUS316L, FKM, PTFE, Electromagnetic stainless steel
Surface Finish	FKM Seal	≤5RA
	Metal Seal	TC,≤5RA
Weight	appr. 5.22 KG

 

APPENDIX 3  SELECTION GUIDE 

5800 Digital UP TO 50SLM MASS FLOW CONTROLLER/METER

Model	Digital Communication	58
Series	Standard model		00
Product Type	Mass Flow Controller			FC
	Mass Flow Meter			FM
Seal	FKM				R
	Metal				M
	All Metal				T
Communication	Digital (RS485/Modbus)& Analog 9pin/±15v					RN
	Digital (RS485/Modbus)& Analog 9pin/12-32v					RV
	Digital (RS485/Modbus)& Analog 9pin/±15v LCD					RM
	Digital (RS485/Modbus)& Analog 9pin/12-32v LCD					RW
Control Valve	Normally Closed						C
	Normally Open(*1)						O
Temperature	Standard 5-45 Deg C							S
	High Temperature*							H
Fitting(*2)	1/8" VCR								E2V
	1/4" VCR								E4V
	1/8" Swagelok Compatible								E2S
	1/4" Swagelok Compatible								E4S
	3/8" Swagelok Compatible								E6S
	1/2" Swagelok Compatible								E8S
	1" Swagelok Compatible								EGS
	6mm LOK								G6S
	10mm LOK								GXS
	6mm Tube Quick connctor								G6T
	IGS 1.125"C-SEAL								IGC
	IGS 1.125"W-SEAL								IGW
GAS	Gas									N2
Full Scale	Flow Rate										100 SCCM

EXAMPLE  MFC:5800-FCRRNCS-E4V-N2-100SCCM  /  MFM:5800-FMRRNS-E4V-N2-100SCCM

(*1) For customized models, please contact your sales representative.
(*2) For more fitting options, please contact your sales representative.
(*3) Flow rate is calibrated (N2 eqv.) at standard temperature and pressure. (Standard: 0 Deg C and 101kPa)
(*4)5800 digital RS-485 model is available with analog model (DC 0-5V)
(*5)More requirement of Electrolytic Polishing or Passivating , please contact your sales representative.
(*6) Temperature for High Temperature models can be customized.